| Summary: | 碩士 === 淡江大學 === 機械工程學系 === 88 === This research contains two parts: first, the improvement of novel micro pressure sensors; second, the application of micro pressure sensors to the in-situ measurement of the pressure distribution of along the micro-channel.
The process research of the follows the proceeding technique, developed by the MEMS group of Tamkang university. This article not only depicts the principle of pressure sensors and the manufacturing of pressure membrane, but also provides improvement to those problems involving sensor performance and cost, e.g., the issues about the design of mask, the control of the thickness of membrane, and the alignment of multi-process.
In the research the piezoresistive sensers have been fabricated sucessfully, and it is proved that the process design is feasible. The testing results showed the approximate sensitivity of these sensors was 0.04 mV/V/psi.
The research not only greatly reduces the chip size of micro pressure sensors, but also provides a testing platform for the in-situ measurement of pressure field along micro-channels. This emerging application would reveal more informations about the further realization and discussions of the fundamental behavior of micro-channel flows.
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