The Optical Properties and Applications of AlN Thin Film
碩士 === 中原大學 === 電子工程研究所 === 89 === AlN thin films were grown on SiO2/Si and quartz substrates using Helicon sputtering system. The dependence of film quality on growth parameters, such as total sputtering pressure, substrate temperature, and nitrogen concentration has been studied. There is a good c...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61446952915513631359 |