| Summary: | 碩士 === 逢甲大學 === 自動控制工程學系 === 89 === The microflow control devices are important in the field of electromechanical industrial automation. The elements for micro flow control devices, such as microvales and micropumps, are the key-elements to well control micro flows. In the project, the valveless micropumps are applied to develop the microflow control devices. The design works include three etched cavities as flow inputs and mixed outputs, and six micronozzles as flow control channels, as well as a flow mixing channel. The research procedures are microdevice parameter simulation, microfabrication, process design and realization, and device’s measurement analysis. The geometric structures and microfabrication process design are done after several relative simulations using softwares of ANSYS, IntelliSuite and MemCAD. After fabricating the micro devices and analyzing the measurement results, the performance analysis of microflow control devices are done to obtain the optimal design parameters, and realized with the optimized characteristics. The unit die size of the microflow control devices is about 23mm´15mm´1.175mm. The operation voltage of the devices is designed about 5~15 volts. The microflow control devices may be used to improve automation and accurate quantity control in flow-control relative industry.
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