DESIGN AND FABRICATION OF A ROTATIONAL MICROGRIPPER BY MEMS TECHNOLOGY

• Main Authors: Hsien-Hui Huang, 黃獻輝
• Other Authors: Shih-Ming Yang
• Format: Others
• Language: zh-TW
• Published: 2001
• Online Access: http://ndltd.ncl.edu.tw/handle/49412955851532950884

碩士 === 國立成功大學 === 航空太空工程學系 === 89 === It would be a little trouble to clip, when the sharp of the picked-up is not matched with the microgripper existed. However, the rotational microgripper could do more than press from the both sides. It would be with more practicality when scratch drive actuator is used, because it could control exactly the angular of itself and the picked-up. Further more, Micro-Electron-Mechanical-Systems (MEMS) has the natures of tiny, delicate and batch production, it has superiority when talking about cost and capability. Here we apply MEMS to design a rotational microgripper. Within 10002 square micrometer, it has three main components, scratch drive actuator (SDA), bimorph microgripper jaw and hinge. To make it clip, we takes advantage of un-equal thermal expansion coefficients of two dissimilar materials deposited over each other. As the temperature increases, because of the different expansion coefficients of various layers, the structure bends and performs the desired work. To make it spin, it is driven by the friction difference between a bushing and a flat plate, when a voltage applied. It is connected by hinge structure. By the way, we also design electrothermal bimorph gripper jaws, micromotors driven by SDA, SDA moved around circular sliders, micro optical switchs and etc.