Fabrication and Measurement of Surface Acoustic Wave Devices and it''s Application

• Main Authors: Yu-Heng C hen, 陳玉衡
• Other Authors: Sheng-Yuan Chu
• Format: Others
• Language: zh-TW
• Published: 2001
• Online Access: http://ndltd.ncl.edu.tw/handle/36660270398668400922

碩士 === 國立成功大學 === 電機工程學系 === 89 === Surface Acoustic Wave (SAW) Devices are basically manufactured by depositing two Interdigital electrodes (IDT) on the polished surface of the piezoelectric substrate；the input IDT can transfer the input electrical signal into the Rayleigh wave；the waves propagate on the surface of the substrate, and then are received and transferred into the electrical signals again by the output IDT. In this thesis, the principles, the manufacture processes and the equivalent circuits of the SAW device are introduced first, Then the SAW devices were fabricated utilizing different piezoelectric substrate with different patterns and measured using HP8714ES network alayzer. We also investigated the effects of electrode on the frequency and corresponding phase response of the devices. Finally, the experimental result are compared with the theoretical result.