Fabrication of high aspect ratio microstructure array by deep x-ray lithography
碩士 === 國立交通大學 === 機械工程系 === 89 ===
Main Authors: | Chao-Min Cheng, 鄭兆珉 |
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Other Authors: | Ren-Haw Chen |
Format: | Others |
Language: | zh-TW |
Published: |
2001
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Online Access: | http://ndltd.ncl.edu.tw/handle/00978453118329867727 |
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