Study of the residual stress and wear resistance in the AlN/VN and AlN/TiN multilayers
碩士 === 國立東華大學 === 材料科學與工程研究所 === 89 === Abstract The residual stresses and wear resistance of the AlN/VN and AlN/TiN multilayers, are pursured in this studies. The AlN/VN and AlN/TiN multilayers with critical thickness about 2.1nm and 1.6nm, respectively in AlN layer, The e...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68004024071379946436 |