鍺銻合金薄膜鈦元素滲雜之製程微結構及物性研究
碩士 === 國立清華大學 === 材料科學工程學系 === 89 === Abstract This study is to observe effects of titanium element doping on the microstructures and physical properties of germanium- antimony alloy films. All films,（GeSb9）1-XTiX（X≦7.5at.%）, were deposited with DC magnetron sputtering....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71963400000853089623 |