The Characterization, Fabrication and Application of Pyroelectric Infrared Sensor with NMOSFET Differential Amplifier Intergration Circuit
碩士 === 國立海洋大學 === 電機工程學系 === 89 === In this paper the integrated pyroelectric infrared sensors have been made using a Lead-Titanate (PbTiO3) thin film on differential NMOSFET. In addition, the TMAH V-groove etch technology is used to increase the sensitivity of the device. The performance...
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| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55248382982097248184 |