| Summary: | 碩士 === 國立臺灣大學 === 電機工程學研究所 === 89 === This paper’s purpose is to develop the integrating circuits of the digital height gauge, including the capacitor board that senses the height and the electric circuit that transduces the capacitance into the voltage.
The developed circuit aims at the micron-sensor, which implements the sensor and circuits in a single chip via standard integrated circuit process. The chip has the advantages of low cost, low noise, and high resolution.
This paper proposes the design of the capacitor board and the integrator circuit. The former is based on the inducing type of capacitor board, which can achieve large capacitance, obvious capacitance change and good linearity via proper design. The latter is based on the offset-compensated switched-capacitor integrator, which can transduces the capacitance signal into the voltage signal. Also, the circuit behavior is related to the ratio of capacitance values. This helps to eliminate the effect of process variation.
Besides the above design and research, this paper implements the proposed sensor chip by using the integrated circuit process, UMC 0.5mm, provided by the Chip Implementation Center. Relevant measurement of the sensor chip shows that the developed integrator circuit is feasible.
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