The Influence of Native Oxide in the Interfacial Reactions of Nb/Si Systems
碩士 === 國立臺灣科技大學 === 機械工程系 === 89 === Abstract The purpose of this study was to investigate the interface reaction between Nb and Si substrates after Nb was deposited on Si substrate by sputtering. Si substrates cleaned with (or without) dipping in a diluted HF solution (HF:H2O=1:50) wer...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53983809612951262530 |