Implementation of Platform for Virtual Equupment Diagnosis
碩士 === 國立臺北科技大學 === 機電整合研究所 === 89 === In order to predict a potential fault that might be about to occur, and to understand what causes the fault of manufacturing equipment, the strategy of predictive maintenance is very important. Taking semi-conductor equipment as an example, for the purpose of s...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55705353503933141964 |