| Summary: | 碩士 === 國立臺北科技大學 === 電腦通訊與控制研究所 === 89 === In the recent year, to keep on advance of the industrial technologies, high-precision positioning without any vibration becomes the most important technology in the manufacturing process, especially semiconductor industry. In this thesis, to achieve these objectives, we have designed and implemented a magnetically levitated system that has the properties of cleanness and frictionless. It is a repulsive maglev system with four active tracks and a passive carrier. In active tracks, the major levitation forces are exerted by permanent magnets, whereas the minor stabilizing forces are exerted by electromagnets.
In control system, we have proposed a grey PID with universal fuzzy step-size control algorithm composed of PID, grey prediction, and fuzzy system for the control processes. From several simulation results, the performance exhibited to demonstrate the feasibility and effectiveness of our proposed.
From experimental results, our proposed approach can stabilize the magnetic levitation system with better response than any other conventional controllers.
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