| Summary: | 碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 89 === The purpose of this research is using non-linear spring to stimulate the stiffness of gap in air bearing, and applying advanced mechanical system simulation tool (ADAMS) to model a virtual hollow rectangular aerostatic guide way and analyze its loading behavior and vibration. Then do the experiment to prove its validity. Finally, using virtual-prototype concepts to construct a virtual hollow rectangular aerostatic guide way in precision linear motion stage, and run a simulated motion test that is extremely close to the real situation. Furthermore, analyze the characteristics of the precision linear motion stage such as the stiffness, loading behavior, natural frequency and dynamic behavior. Hopefully, through this study, the system and the geometric model that are complete parameter could be established. This research provide an analysis way of hollow rectangular aerostatic guide way in linear motion stage before it has not been invented yet.
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