矽晶柱氧化疊差（OISF）之自動視覺檢驗
碩士 === 元智大學 === 工業工程研究所 === 89 === Oxidation Induce Stacking Fault (OISF) is frequently inspected in the crystal growing process of semiconductor industry. The appearance of OISF has “bar” and “half-moon” types that are mainly produced in crystal growth and silicon crystal post-manufacturing process...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/72124146342291048116 |