| Summary: | 碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 90 === The purpose of present study is to set up a simulative model combining effects of natural convection and thermal radiation in the lamp vessel of RTP furnace. Most is devoted to the investigation of the heat flux on the bottom surface, where the energy left the vessel into the RTP chamber, under different working circumstances.
From our investigation, we find out that more energy leaves the bottom surface of the vessel into the RTP chamber when we plate with metal of lower absorptivity on the reflected surface. On the other hand, the energy leaving the bottom surface is also increased as we increase the temperature of the RTP chamber (the temperature on the bottom surface of the vessel). Finally, the flow rate of external cooling system will affect the flow field of the vessel but has little impact on the heat flux leaving the vessel.
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