Comparison of Three Samplers for Sampling Inorganic Airborne Molecular Contaminants in Clean Room Environment
碩士 === 國立交通大學 === 環境工程所 === 90 === Inorganic airborne molecular contaminants are important sources of contamination in cleanroom air that may cause device failure and decrease product yield. In this study, the optimal sampling conditions of two types of silica gel tubes as well as the impinger sampl...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77235572525124033166 |