Design, fabrication and testing ofhigh-numerical-aperture GaN microlens
碩士 === 國立中央大學 === 物理研究所 === 90 === Abstract Plano-convex diffractive microlenses were fabricated in GaN-based materials with a gray-level mask for the first time. The surface relief of the gray-level diffractive microlens on photoresist was transferred onto GaN by inductively coupled plasma etching...
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2002
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ndltd-TW-090NCU051980152015-10-13T10:11:30Z http://ndltd.ncl.edu.tw/handle/89601886566185509760 Design, fabrication and testing ofhigh-numerical-aperture GaN microlens 氮化鎵高數值孔徑微透鏡之設計、製作與特性分析 Ming-Hung Lee 李明洪 碩士 國立中央大學 物理研究所 90 Abstract Plano-convex diffractive microlenses were fabricated in GaN-based materials with a gray-level mask for the first time. The surface relief of the gray-level diffractive microlens on photoresist was transferred onto GaN by inductively coupled plasma etching technique. The microlenses were characterized with a blue laser diode emitting at 405nm. The focal length of the GaN diffractive microlens is 14.5cm. The potential of the realization of the high-numerical-aperture diffractive microlens in GaN with gray-level mask is discussed. Gou-Chung Chi 紀國鐘 2002 學位論文 ; thesis 72 zh-TW |
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碩士 === 國立中央大學 === 物理研究所 === 90 === Abstract
Plano-convex diffractive microlenses were fabricated in GaN-based materials with a gray-level mask for the first time. The surface relief of the gray-level diffractive microlens on photoresist was transferred onto GaN by inductively coupled plasma etching technique. The microlenses were characterized with a blue laser diode emitting at 405nm. The focal length of the GaN diffractive microlens is 14.5cm. The potential of the realization of the high-numerical-aperture diffractive microlens in GaN with gray-level mask is discussed.
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| author2 |
Gou-Chung Chi |
| author_facet |
Gou-Chung Chi Ming-Hung Lee 李明洪 |
| author |
Ming-Hung Lee 李明洪 |
| spellingShingle |
Ming-Hung Lee 李明洪 Design, fabrication and testing ofhigh-numerical-aperture GaN microlens |
| author_sort |
Ming-Hung Lee |
| title |
Design, fabrication and testing ofhigh-numerical-aperture GaN microlens |
| title_short |
Design, fabrication and testing ofhigh-numerical-aperture GaN microlens |
| title_full |
Design, fabrication and testing ofhigh-numerical-aperture GaN microlens |
| title_fullStr |
Design, fabrication and testing ofhigh-numerical-aperture GaN microlens |
| title_full_unstemmed |
Design, fabrication and testing ofhigh-numerical-aperture GaN microlens |
| title_sort |
design, fabrication and testing ofhigh-numerical-aperture gan microlens |
| publishDate |
2002 |
| url |
http://ndltd.ncl.edu.tw/handle/89601886566185509760 |
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AT minghunglee designfabricationandtestingofhighnumericalapertureganmicrolens AT lǐmínghóng designfabricationandtestingofhighnumericalapertureganmicrolens AT minghunglee dànhuàjiāgāoshùzhíkǒngjìngwēitòujìngzhīshèjìzhìzuòyǔtèxìngfēnxī AT lǐmínghóng dànhuàjiāgāoshùzhíkǒngjìngwēitòujìngzhīshèjìzhìzuòyǔtèxìngfēnxī |
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