Fabrication of Poly-Silicon Thin Films at Low Temperature by PECVD
碩士 === 國立中央大學 === 光電科學研究所 === 90 === none
Main Authors: | Zhi-Hong Peng, 彭智宏 |
---|---|
Other Authors: | Pei-Li Chen |
Format: | Others |
Language: | zh-TW |
Published: |
2002
|
Online Access: | http://ndltd.ncl.edu.tw/handle/40633233422021151561 |
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