Deposition of diamond-like carbon thin film on LiNbO3 substrate and evaluation of the fabrication of a SAW filter
碩士 === 國立中山大學 === 物理學系研究所 === 90 === In the present thesis, diamond-like carbon thin films were deposited on Si(100) and LiNbO3 substrates by a planar capacitor plasma-enhence-chemical-vapor-deposition system. The reaction gases were C2H2,CH4,O2 and mixed with Ar (95﹪) and H2(5﹪).The influence of th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29274680240295301754 |