記錄膜製程對相變化型光碟性質影響研究
碩士 === 國立清華大學 === 材料科學工程學系 === 90 === Ag-In-Sb-Te alloy films have been widely used due to their useful application as a recording material for phase change optical disks. The films were prepared by magnetron sputtering of AgInSbTe target in the presence of Argon gas. Effects of deposit...
Main Author: | |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2002
|
Online Access: | http://ndltd.ncl.edu.tw/handle/92425416440590309117 |
id |
ndltd-TW-090NTHU0159061 |
---|---|
record_format |
oai_dc |
spelling |
ndltd-TW-090NTHU01590612015-10-13T10:34:05Z http://ndltd.ncl.edu.tw/handle/92425416440590309117 記錄膜製程對相變化型光碟性質影響研究 陳瑞興 碩士 國立清華大學 材料科學工程學系 90 Ag-In-Sb-Te alloy films have been widely used due to their useful application as a recording material for phase change optical disks. The films were prepared by magnetron sputtering of AgInSbTe target in the presence of Argon gas. Effects of deposition method of AgInSbTe films on disk quality have not been reported yet. In this study, we found that the AgInSbTe films deposited by RF magnetron sputtering have higher index of refraction, higher absorption coefficient, higher density, less vacancies, fewer Ar gas, and better film surface flatness than that deposited by DC magnetron sputtering. Under the write/erase speed of CD-4X, the recording layer deposited by RF magnetron sputtering has higher erasibility and wider suitable write/erase power range than that deposited by DC magnetron sputtering. In this study, the CNR value of disk sputtered by RF magnetron sputtering method is 57.9dB, and the erasibility is 25.5 dB. 周麗新 2002 學位論文 ; thesis 85 zh-TW |
collection |
NDLTD |
language |
zh-TW |
format |
Others
|
sources |
NDLTD |
description |
碩士 === 國立清華大學 === 材料科學工程學系 === 90 === Ag-In-Sb-Te alloy films have been widely used due to their useful application as a recording material for phase change optical disks. The films were prepared by magnetron sputtering of AgInSbTe target in the presence of Argon gas. Effects of deposition method of AgInSbTe films on disk quality have not been reported yet. In this study, we found that the AgInSbTe films deposited by RF magnetron sputtering have higher index of refraction, higher absorption coefficient, higher density, less vacancies, fewer Ar gas, and better film surface flatness than that deposited by DC magnetron sputtering. Under the write/erase speed of CD-4X, the recording layer deposited by RF magnetron sputtering has higher erasibility and wider suitable write/erase power range than that deposited by DC magnetron sputtering. In this study, the CNR value of disk sputtered by RF magnetron sputtering method is 57.9dB, and the erasibility is 25.5 dB.
|
author2 |
周麗新 |
author_facet |
周麗新 陳瑞興 |
author |
陳瑞興 |
spellingShingle |
陳瑞興 記錄膜製程對相變化型光碟性質影響研究 |
author_sort |
陳瑞興 |
title |
記錄膜製程對相變化型光碟性質影響研究 |
title_short |
記錄膜製程對相變化型光碟性質影響研究 |
title_full |
記錄膜製程對相變化型光碟性質影響研究 |
title_fullStr |
記錄膜製程對相變化型光碟性質影響研究 |
title_full_unstemmed |
記錄膜製程對相變化型光碟性質影響研究 |
title_sort |
記錄膜製程對相變化型光碟性質影響研究 |
publishDate |
2002 |
url |
http://ndltd.ncl.edu.tw/handle/92425416440590309117 |
work_keys_str_mv |
AT chénruìxìng jìlùmózhìchéngduìxiāngbiànhuàxíngguāngdiéxìngzhìyǐngxiǎngyánjiū |
_version_ |
1716828967266156544 |