Characteristics of a Large Area RF Capacitively Coupled Plasma
碩士 === 國立清華大學 === 物理學系 === 90 ===
Main Authors: | N. Y. Hsu, 許乃玉 |
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Other Authors: | C. S. Kou |
Format: | Others |
Language: | zh-TW |
Published: |
2002
|
Online Access: | http://ndltd.ncl.edu.tw/handle/02877840225355347274 |
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