Analysis and Design of Torsion Mirror for Bistable Micro Compliant Mechanism
碩士 === 國立清華大學 === 動力機械工程學系 === 90 === This thesis presents the analysis and design of a type of torsion mirror that integrated with a bistable micro compliant mechanism. The mirror, which is about 300 mm on a side, is driven by a bistable compliant mechanism and has resonant frequencies i...
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ndltd-TW-090NTHU03111202015-10-13T10:34:06Z http://ndltd.ncl.edu.tw/handle/06174119707537250716 Analysis and Design of Torsion Mirror for Bistable Micro Compliant Mechanism 結合雙穩態微撓性機構之扭轉鏡片之分析與設計 Tzu-Hao Yeh 葉子豪 碩士 國立清華大學 動力機械工程學系 90 This thesis presents the analysis and design of a type of torsion mirror that integrated with a bistable micro compliant mechanism. The mirror, which is about 300 mm on a side, is driven by a bistable compliant mechanism and has resonant frequencies in the kilohertz range. Having selected the topology of the device, the equations governing the motions and the forces of the torsion mirror and the actuator can be derived. The bistable micro-mechanism being driven by the SDA and the associated torsion mirror are fabricated by the three-layer polysilicon surface micromachining technology supported by MUMPs (Multi-User MEMS Processes Service) of Cronos Integrated Microsystems. The device consists of three major parts: the mirror, compliant mechanism and SDA. The mirror is fixed on the substrate by the hinges. Polysilicon structures with integrally fabricated hinges are rotated out of the plane of the wafer after fabrication, and interconnected with other structures to form complex three-dimensional designs with detailed features in all three dimensions. The preliminary simulations of the device include analyzing the nature frequencies and the stresses of the mirror and torsion beam. The stresses on the components were found to be acceptable for preliminary fabrication prototyping. Cheng-Kuo Sung 宋震國 2002 學位論文 ; thesis 84 zh-TW |
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碩士 === 國立清華大學 === 動力機械工程學系 === 90 === This thesis presents the analysis and design of a type of torsion mirror that integrated with a bistable micro compliant mechanism. The mirror, which is about 300 mm on a side, is driven by a bistable compliant mechanism and has resonant frequencies in the kilohertz range. Having selected the topology of the device, the equations governing the motions and the forces of the torsion mirror and the actuator can be derived. The bistable micro-mechanism being driven by the SDA and the associated torsion mirror are fabricated by the three-layer polysilicon surface micromachining technology supported by MUMPs (Multi-User MEMS Processes Service) of Cronos Integrated Microsystems. The device consists of three major parts: the mirror, compliant mechanism and SDA. The mirror is fixed on the substrate by the hinges. Polysilicon structures with integrally fabricated hinges are rotated out of the plane of the wafer after fabrication, and interconnected with other structures to form complex three-dimensional designs with detailed features in all three dimensions. The preliminary simulations of the device include analyzing the nature frequencies and the stresses of the mirror and torsion beam. The stresses on the components were found to be acceptable for preliminary fabrication prototyping.
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author2 |
Cheng-Kuo Sung |
author_facet |
Cheng-Kuo Sung Tzu-Hao Yeh 葉子豪 |
author |
Tzu-Hao Yeh 葉子豪 |
spellingShingle |
Tzu-Hao Yeh 葉子豪 Analysis and Design of Torsion Mirror for Bistable Micro Compliant Mechanism |
author_sort |
Tzu-Hao Yeh |
title |
Analysis and Design of Torsion Mirror for Bistable Micro Compliant Mechanism |
title_short |
Analysis and Design of Torsion Mirror for Bistable Micro Compliant Mechanism |
title_full |
Analysis and Design of Torsion Mirror for Bistable Micro Compliant Mechanism |
title_fullStr |
Analysis and Design of Torsion Mirror for Bistable Micro Compliant Mechanism |
title_full_unstemmed |
Analysis and Design of Torsion Mirror for Bistable Micro Compliant Mechanism |
title_sort |
analysis and design of torsion mirror for bistable micro compliant mechanism |
publishDate |
2002 |
url |
http://ndltd.ncl.edu.tw/handle/06174119707537250716 |
work_keys_str_mv |
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