Analysis and Design of Torsion Mirror for Bistable Micro Compliant Mechanism

• Main Authors: Tzu-Hao Yeh, 葉子豪
• Other Authors: Cheng-Kuo Sung
• Format: Others
• Language: zh-TW
• Published: 2002
• Online Access: http://ndltd.ncl.edu.tw/handle/06174119707537250716

碩士 === 國立清華大學 === 動力機械工程學系 === 90 === This thesis presents the analysis and design of a type of torsion mirror that integrated with a bistable micro compliant mechanism. The mirror, which is about 300 mm on a side, is driven by a bistable compliant mechanism and has resonant frequencies in the kilohertz range. Having selected the topology of the device, the equations governing the motions and the forces of the torsion mirror and the actuator can be derived. The bistable micro-mechanism being driven by the SDA and the associated torsion mirror are fabricated by the three-layer polysilicon surface micromachining technology supported by MUMPs (Multi-User MEMS Processes Service) of Cronos Integrated Microsystems. The device consists of three major parts: the mirror, compliant mechanism and SDA. The mirror is fixed on the substrate by the hinges. Polysilicon structures with integrally fabricated hinges are rotated out of the plane of the wafer after fabrication, and interconnected with other structures to form complex three-dimensional designs with detailed features in all three dimensions. The preliminary simulations of the device include analyzing the nature frequencies and the stresses of the mirror and torsion beam. The stresses on the components were found to be acceptable for preliminary fabrication prototyping.