Investigation of thermal stability of Ta diffusion barrier affecting by magnesium in Cu metallization
碩士 === 國立清華大學 === 工程與系統科學系 === 90 ===
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| Language: | zh-TW |
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2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04846164859407875041 |
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ndltd-TW-090NTHU0593040 |
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ndltd-TW-090NTHU05930402015-10-13T10:34:06Z http://ndltd.ncl.edu.tw/handle/04846164859407875041 Investigation of thermal stability of Ta diffusion barrier affecting by magnesium in Cu metallization 鎂在銅導線製程中影響鉭擴散障礙層熱穩定性之研究 麥凱玲 碩士 國立清華大學 工程與系統科學系 90 開執中 陳福榮 2002 學位論文 ; thesis 0 zh-TW |
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NDLTD |
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zh-TW |
| format |
Others
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| sources |
NDLTD |
| description |
碩士 === 國立清華大學 === 工程與系統科學系 === 90 ===
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| author2 |
開執中 |
| author_facet |
開執中 麥凱玲 |
| author |
麥凱玲 |
| spellingShingle |
麥凱玲 Investigation of thermal stability of Ta diffusion barrier affecting by magnesium in Cu metallization |
| author_sort |
麥凱玲 |
| title |
Investigation of thermal stability of Ta diffusion barrier affecting by magnesium in Cu metallization |
| title_short |
Investigation of thermal stability of Ta diffusion barrier affecting by magnesium in Cu metallization |
| title_full |
Investigation of thermal stability of Ta diffusion barrier affecting by magnesium in Cu metallization |
| title_fullStr |
Investigation of thermal stability of Ta diffusion barrier affecting by magnesium in Cu metallization |
| title_full_unstemmed |
Investigation of thermal stability of Ta diffusion barrier affecting by magnesium in Cu metallization |
| title_sort |
investigation of thermal stability of ta diffusion barrier affecting by magnesium in cu metallization |
| publishDate |
2002 |
| url |
http://ndltd.ncl.edu.tw/handle/04846164859407875041 |
| work_keys_str_mv |
AT màikǎilíng investigationofthermalstabilityoftadiffusionbarrieraffectingbymagnesiumincumetallization AT màikǎilíng měizàitóngdǎoxiànzhìchéngzhōngyǐngxiǎngtǎnkuòsànzhàngàicéngrèwěndìngxìngzhīyánjiū |
| _version_ |
1716829266035867648 |