Suppression of Copper Diffusion by γ Irradiated low-k Organic Dielectric Material
碩士 === 國立清華大學 === 工程與系統科學系 === 90 ===
Main Authors: | Cheng-Hong Jiang, 姜政宏 |
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Other Authors: | Tien-Ko Wang |
Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/75297329337095924741 |
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