| Summary: | 碩士 === 國立清華大學 === 工程與系統科學系 === 90 === It is well know that the micro-jet printing process has been demonstrated to be a highly cost-effective, precise, environmentally friendly method of fabrications and a wide variety of materials and principles. The low-end printing market as we are used to the desktop printers have been widely using this technique (MEMS) to fabricate those print-heads. .
The improved micro droplet injector design is presented here which is just slight modified basing on my advisor professor Tseng’s PhD dissertation5 in UCLA. This new design here could improve the nozzle pitch by using the (110) single crystal silicon wafer to get more closed channel distance. As the result, we could get the higher resolution printings and would be going to apply to the color printer. Those designs have great advantages over conventional print-heads in the cost, resolution and reliability aspect. Moreover, it can integrate circuit with hundreds of nozzles in just one inch. Here, in this dissertation presents our achievement, fabrication and some results for clear understanding, and also shows a precision alignment method for single crystal silicon orientation finding. .
The highest density in 2-dimension region can be reached by the arrangement of each element injector with the vertical lateral walls, and additional electroplated metal layer would be cover on all structures to protect the print heads from the external force and become more robust. .
The improved destinations in this dissertation would be demonstrated until the final experiment has been completely finished and tested. Unfortunately, according to my fabrication process the Low-stress nitride film play an important role, it’s a pity that these films obtained in this design play a critical role but it’s not good enough. That the reason why my experiment cannot success completely, but basic on those experiences I also provide the best way to solve those problems or avoid some dangerous process.
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