| Summary: | 碩士 === 國立海洋大學 === 機械與輪機工程學系 === 90 === Abstract
The industry relative to ICs, either inside or outside my country, has a higher growth rate than the others. Since IC industry is high tech and high precision manufacturing, their production machines, it is very important to attenuate micro-vibrations caused by various sources. Vibration isolators can be divided into passive types and active types. Although passive vibration isolators have the advantages of simple structures and low cost. However, the applications of passive vibration isolators are limited due to weak performance under low frequency vibrations. On the contrary, active vibration isolators can work well under low frequency vibrations, and their characteristics can also be appropriately tuned dependent on the environments. Hence, active vibration isolators have been extensively used to solve vibration problems in the spite of higher cost and complexity.
Although, linear actuators have the above advantages, only the countries such as Japan and USA know the most key techniques and their products are very expensive. This proposal is aimed at developing a linear actuator.
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