SIMULATION AND ANALYSIS OF CERTAIN MULTI-PROCESSES IC MANUFACTURING SYSTEM

• Main Authors: FengSen Chem, 陳峰森
• Other Authors: L.Liu
• Format: Others
• Language: zh-TW
• Published: 2000
• Online Access: http://ndltd.ncl.edu.tw/handle/47041031186035004290

碩士 === 東海大學 === 數學系 === 90 === Abstract This paper is the continuation of a series study led by Dr. Liu which is about the design of flow-control technique and simulation programming of IC fabrication system. We propose a new flow-control technique called "the interval-smoothness- short-value technique ". Its design is based on a global view of the operation system while other flow-control techniques are based on local views. In addition, our study extend from the original single-process operation system to the current double-process system. The code lines of the simulation program are decreased from 5364 to 3028. Also the time of a simulation run is shortened by 67%, and the throughput is increased by 3.5%. This software can evaluate some performance like the throughput, time for delivering goods, and the distribution of the numbers of different machines. The study above is done by Mr. Wang and I. We share the same results of the study but branch out in writing up the theses. Mr. Wang puts stress on the contrasts between our new technique and the previous flow-control technique in the series. However, I emphasize on the explanation of the simulation program and related data under the double- process operation system.