Low temperature synthesis and small diameter of carbon nanotubes by microwave plasma-enhanced chemical vapor deposition

• Main Author: 李明修
• Other Authors: 林啟瑞
• Format: Others
• Language: zh-TW
• Published: 2002
• Online Access: http://ndltd.ncl.edu.tw/handle/68793764086857677282

碩士 === 國立臺北科技大學 === 製造科技研究所 === 90 === The main focus of this thesis is to study low temperature growth of carbon nanotubes by MPECVD and by using ferrocene as catalyst in order to reduce the diameter of the carbon nanotubes. Studies show that large-area and well-aligned carbon nanotubes have been successfully obtained by using ferrocene powder as catalyst. As for the low temperature growth, we have fabricated carbon nanotubes on ITO glass at 500℃ by using Fe-Ni thin film as catalyst. Further reduction of the process temperature led to formation of carbon-iron phase lesser quality. By using Ferrocene and Nicklocene powder as catalyst, it turns out that carbon nanotube can be found on the top of carbon fiber with diameter of less than 10 nm. The filed emission properties of CNTs grown on Si substrate at 1000℃ by using ferrocene powder as catalyst show a turn-on field of 1 V/μm, at which the current density was 10 mA/cm2.In contract, the turn-on field of CNTs grown on ITO glass at 500℃ was strongly dependent on the growth time. With the growth time increases, the turn-on field tends to decrease. Over all, field emission properties of the low temperature grown CNTs are inferior to their counter parts grown at higher temperature.