Fabrication of DLC triode field emission device on glass substrate by reactive sputtering deposition
碩士 === 大同大學 === 光電工程研究所 === 90 === Our purpose is to deposit field emission diamond-like carbon films on glass. Titanium can wet on glass very well，therefore DLC films were deposited on the Ti/glass substrates for good adhesion. And we change the deposition parameters of deposition DLC fi...
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46111927047359878939 |
| Summary: | 碩士 === 大同大學 === 光電工程研究所 === 90 === Our purpose is to deposit field emission diamond-like carbon films on glass. Titanium can wet on glass very well，therefore DLC films were deposited on the Ti/glass substrates for good adhesion. And we change the deposition parameters of deposition DLC film on Ti/glass substrate. To find the optimum deposition conditions for the field emission behavior. In general, most of electrons are deflected to the gate in triode mode operation. We surprised the I-V measurement and the CL observation. It indicates that only some tips emit electrons through spacer to anode in diode mode operation. Gate voltage provided effective high electric field almost every pixel provide electron beam to the phosphor. The current density of the triode type field emission array is 171.74μA/cm2 at 4.97 volt gate bias and 400V anode bias.
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