Fabrication of DLC triode field emission device on glass substrate by reactive sputtering deposition
碩士 === 大同大學 === 光電工程研究所 === 90 === Our purpose is to deposit field emission diamond-like carbon films on glass. Titanium can wet on glass very well，therefore DLC films were deposited on the Ti/glass substrates for good adhesion. And we change the deposition parameters of deposition DLC fi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46111927047359878939 |