| Summary: | 碩士 === 大同大學 === 光電工程研究所 === 90 === In this thesis, the proton-exchanged technique is used to fabricate several waveguide on z-cut Lithium Niobate substrates . This technique has the advantages such as simple treatment, low loss and low cost. At the same time, we also use the Inductively Coupled Plasma Reactive Ion Etching, ICP-RIE to etch the Lithium Niobate. By mixture of 、Ar and . We find that if we input different proportion of Hydrogen, we can get the different etching rate and it also affects the roughness of the etched surface. Finally we also take use of the technique to fabricate the ridge-type waveguide.
Both theoretical analysis and experimental measurement has been carried out for the comparison. In this thesis, the near-field(NF) method is applied to the index profile measurement. However, there exist noise problem. We propose the use of a field function calculated by variation method to smooth the measured intensity profile without or loss of accuracy. A new trial field, namely, the modified Hermite-Gauss (MHG) function has been used. We have coupled laser beam(at 0.6328 μｍ wavelength) into devices by virtue of the end-fire coupling method, have also verified the therries .
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