Fabrication of Micro Electrostatic Motor Using Micro-EDM Technology

• Main Authors: Bao-Qinq Mao, 毛寶慶
• Other Authors: Chia-Lung Kuo
• Format: Others
• Language: zh-TW
• Published: 2002
• Online Access: http://ndltd.ncl.edu.tw/handle/26004816481311029541

碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 90 === This is thesis is to discuss the fabrication of the micro electrostatic motor by the micro-EDM technique and to deeply research about the shape design and the exploitation process of the micro motor. This micro motor can be constructed, through the process, by assembling the bearing, stator, and rotor into a base. In terms of the micro assembly precision, the process from the fabrication of all micro parts to the micro assembly should be completed within the micro-EDM machine. To attain bonding strength and insulated effect between base and bearing, a glued method is utilized in the process; however, the assembly of the rotor and the bearing has the free degree of the rotation by mechanical micro loose fit. The assembly of the parts need to be separated by the electrode; a method, proposed in this thesis, of the separation by Wire Electro-Discharge mechanism to avoid the negative effect of the assembly parts due to the separation of the extra force. For the combinative strength of the fabrication of the glues or the mechanical micro loose fit, using self-design jig to clip the electrode and proceeding a tensile with micro tensile tester are to build the applicative range of the combinative strength. Final test is to use the electrode of the copper wire to check weather the stator and the rotor would be insulated or not.