The study of pyromellitic dianhydride based polyimides for interlevel dielectrics
碩士 === 中原大學 === 化學工程研究所 === 91 === 英文摘要 Organic dielectrics will play an important role in microelectronic industry, because they have good mechanical properties, high thermal stability and quite low dielectric constant. In this study, a series of pyromellitic dianhydride based polyimides were p...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96015080315589208367 |