A Study on the Application of DSP Chip for Precision Positioning System Controlling

• Main Authors: Tsang-Chou Li, 李滄洲
• Other Authors: Jau-Liang Chen
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/57180247867763290271

碩士 === 國立中興大學 === 機械工程學系 === 91 === Along with the development of industry, more and more efforts are focusing on the nano-technology in recent year. Among these, precision positioning is an indispensable technology. Most control systems used in precision positioning were PC based controller. Only few of them were using digital signal processor (DSP) as the controller. The objective of this research is to use a DSP for controlling the precision positioning system. In this research, a TMS320C542 DSP chip, manufactured by TI, was used, and through memory accessing, digital and analog converting, to control the positioning system. The positioning system was constructed by a PZT actuator, a flexural stage that composed by flexural hinges and parallel springs, and a capacitor sensor. The PZT pushing the stage, while the position of the stage was sensing by the capacitor and feedback to the DSP controller to form a closed loop feedback control system. PI control rule together with N-times feed-forward control rule were used for the controlling of this system. From the experiment results, it was shown that the bias was within 2 nm and the standard deviation 1σ was around 30 nm, with settling time equaled to 0.02sec, in the continuous stepping test. While, in the ramp tracking test, the bias was within 0.5 nm and the standard deviation 1σ was around 30 nm.