Research of Atmospheric Pressure Plasma Technology

• Main Authors: Jeng-Chang Ho, 何政昌
• Other Authors: Franklin Chau-Nan Hong
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/38057142228984221630

碩士 === 國立成功大學 === 化學工程學系碩博士班 === 91 === Atmospheric discharges do not need to use the expensive vacuum equipments, and is suitable for continuous operations for mass production in industry. However atmospheric plasma technology remains difficult for most of gases other than helium, which is expensive and not reactive. The goal of this study is to establish a homogenous atmospheric non-equilibrium discharge system by designing the electrode, flow field and external biasing. After many attempts, a new design using multiple dielectric electrode arrays is capable of generating homogeneous argon discharges by uniformly distributing gas with a filter plate and accelerating the discharge with a third electrode. However, this design still fails to produce uniform discharges for the gases other than helium and argon. Besides, plasma treatments of polymer for surface modifications have been conducted using the new electrode design with air, argon, nitrogen, helium, and oxygen gases. Contact angle measurements and scanning electron microscopy have been used to characterize the surface energy and surface morphology, respectively. The efficiency of plasma cleaning is best for nitrogen and argon gases under the treatment for one minute. By using the third electrode to bias the substrate, the cleaning efficiency can be improved using the third electrode. Although the plasma treatment induces grooves on the polymer surface, the substrate bias does not seem to affect the surface morphology.