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• Main Authors: Hsin-Der Loi, 呂信德
• Other Authors: Chi-Yen Huang
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/71022633698628953598

碩士 === 國立成功大學 === 資源工程學系碩博士班 === 91 === Photocatalyst has received much attention for strongly redox reaction and superhydrophile. The window glass coated with photocatalyst can increase the action area and reduce the pollutant to maintain a clean surface. For applying to indoor enviroment, it must be develop the visible radiation absorption efficiency. The preparation of nano-sized TiO2-WO3 composite thin film coated by radio-frequency magnetron sputtering has been studied. The control factors of this research include time and voltage of sputtering, the ratio between TiO2 and WO3 target material . Later on an annealing treatment will be applied on TiO2/WO3 composite film to convert the armorphous phase of TiO2 to crystalline. Finally this film will be examined by spectrum analysis and scanning electron microscope. Hydrophilic property and decomposition ability will be examined too. The results given above clearly demonstrate that the preparation of nano-sized TiO2 films doped WO3 can be formed via condition of 150W 120minutes, 1.25nm/min of sputer rate, and 1 vol.% tungsten co-sputtering, then a significant photocatalytic rate enhancement and photo-generated superhydrophilic phenomenon is observed. After annealing at 350℃, anatase phase identified in TiO2 thin film; the grain size of TiO2-WO3 grew up a little. The pre-sputtering layer of SiO2 can disconnect the surface reaction between glass substrate and TiO2-WO3 photocatalyst and avoide decrease of component transmittances.