Fang, S., 方崧任, & Chu, P. (2003). The Study of Stress Effect on the Formation of CoSi2 in Deep Submicron ULSI TechnologyandThe Study of Dummy Metal Charging Effect Induced Tungsten Plug Corrosion in Deep Submicron ULSI Technology.
Chicago Style (17th ed.) CitationFang, Sun-Jen, 方崧任, and Po-Tao Chu. The Study of Stress Effect on the Formation of CoSi2 in Deep Submicron ULSI TechnologyandThe Study of Dummy Metal Charging Effect Induced Tungsten Plug Corrosion in Deep Submicron ULSI Technology. 2003.
MLA (8th ed.) CitationFang, Sun-Jen, et al. The Study of Stress Effect on the Formation of CoSi2 in Deep Submicron ULSI TechnologyandThe Study of Dummy Metal Charging Effect Induced Tungsten Plug Corrosion in Deep Submicron ULSI Technology. 2003.
Warning: These citations may not always be 100% accurate.