Vibration Analysis of Atomic Force Microscopy Probe

• Main Authors: Kuen-Wey Lin, 林昆蔚
• Other Authors: Sen-Yung Lee
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/88283486170078311211

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 91 === The study is to establish the dynamic measuring modes of microprobes of an atomic force microscopy. The forced vibration of a non-uniform beam with the time-dependent elastic boundary conditions, damping and concentrated tip mass is considered. The governing differential equation and the associated boundary conditions are derived by using the Hamilton’s principle. The non-homogeneous boundary conditions are transformed into homogeneous ones through the procedure of change of dependent variable. A new analytical solution for the system of non-contact mode is derived to solve the problem with nonlinear boundary condition. This method can be generally applied to solve the problems with nonlinear boundary conditions. By utilizing this method, the frequency shift of non-contact mode is investigated. When the microprobe approaches the sample surface, the nonlinear interaction between tip and sample causes a resonant frequency shift of the microprobe. Thus an atomic-scale surface image can be profiled with the frequency shift. Finally, the influence of the parameters on the transient response and the resonant frequency shift are investigated.