Design and Implementation on Process Module Controller for Cluster Tools
碩士 === 國立交通大學 === 機械工程系 === 91 === In this thesis, we develop a process module controller that conforms to SEMI standard. The main point is to use object-oriented method to develop a flexible and reusable software architecture where the UML is adopted to analyze and design the controller...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/57348335467368659336 |