Design and Implementation on Process Module Controller for Cluster Tools
碩士 === 國立交通大學 === 機械工程系 === 91 === In this thesis, we develop a process module controller that conforms to SEMI standard. The main point is to use object-oriented method to develop a flexible and reusable software architecture where the UML is adopted to analyze and design the controller...
Main Authors: | Ching-Chung Tai, 戴慶忠 |
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Other Authors: | An-Chen Lee |
Format: | Others |
Language: | zh-TW |
Published: |
2003
|
Online Access: | http://ndltd.ncl.edu.tw/handle/57348335467368659336 |
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