Anodic Aluminum Oxide Assisted Preparation of Silica Tubes

• Main Authors: Pei-Sun Sheng, 盛焙蓀
• Other Authors: 裘性天
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/79507500284085862524

碩士 === 國立交通大學 === 應用化學系 === 91 === Si/SiO2 tubes were successfully synthesized by using SiCl4 as a precursor to react with Na tubes which decomposed from NaH and flowed into AAO channel. The diameter of the synthesized Si/SiO2 tubes consist with that of AAO channels. The samples were characterized by SEM, TEM, EDS, ED, IR, XRD and XPS to examine the morphology and composition. SEM studies indicated that the tubes with porous walls were found at the reaction temperature of 623 K and annealing temperature of 873 K. From EDS analysis, those tubes consisted of Si and O elements. ED and XRD studies showed that the tubes were amorphous, and Si-O-Si absorption was observed by IR. According to the XPS data, there were two types of chemical environment for Si in this sample — Si and SiO2. The Si/SiO2 tubes were oxidized futher by O2 stream to form pure SiO2 tubes. The reason of forming the pores on the wall was detemined by EDS and XRD, it is speculated that NaCl was formed during the reaction to insert on the wall, and dissolved with HCl solution for removing AAO membranes.