A Research for the study of local exhaust improvement for semiconductor manufacturing equipments preventive maintenance

• Main Authors: C. H Chang, 張建新
• Other Authors: 張翼
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/34076275056944817469

碩士 === 國立交通大學 === 產業安全與防災學程碩士班 === 91 === ABSTRACT The semiconductor industry in Taiwan developed rapidly under the government policy. Taiwan may replace Korea to become the largest semiconductor-manufacturing country beyond United States and Japan in 2010. There are operation and maintenance handbooks for semiconductor-manufacturing equipments, however, due to the large variety of equipments and high accuratcy requirements for the equipements, the complexity for the equipments maintenance and troubleshooting increase. The local exhaust hood improvement for the semiconductor manufacturing equipments can be used as preventive maintenance tool. In this study, we call it “PM Hood”. The PM Hood was designed to prevent employees from breathing toxic gas or suspended solid and thus protect their health during maintenance. We designed six types of PM hoods for six different types of semiconductor manufacturing equipments in this project. It was found that a lot of aeration pollutants (including Cl2、BCl3、CHF3、CO、IPA…etc) and solid pollutants (including metal vapors and suspended solid) can be avoided during preventive maintenance. These pollutants may affect the clean room cleanliness and make serious impact on employees’ healthy if not reduced. All the PM hoods could control pollutants inside the chamber and prevent them form emiting into the atmosphere. The collection efficiency was above 90% in all types of PM hood designed. We have successfully designed the PM hood for PM operation. However, the design of the PM hood depends on the machine type, however, the internal chamber parts may cause some PM hood operation inconvenient. Therefore, how to communicate with machine manufacturing vendors to add the PM hood idea into new type of machines will be the most important thing in the future.