Characteristics and Plasma effects on MOSFET Devices with HfOxNyGate Dielectrics
碩士 === 國立清華大學 === 工程與系統科學系 === 91 ===
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2003
|
Online Access: | http://ndltd.ncl.edu.tw/handle/40813786199477234900 |
id |
ndltd-TW-091NTHU0593072 |
---|---|
record_format |
oai_dc |
spelling |
ndltd-TW-091NTHU05930722016-06-22T04:26:25Z http://ndltd.ncl.edu.tw/handle/40813786199477234900 Characteristics and Plasma effects on MOSFET Devices with HfOxNyGate Dielectrics 鉿氧氮閘介電層金氧半電晶體特性及其電漿效應研究 Jack P.H. Tsai 蔡秉宏 碩士 國立清華大學 工程與系統科學系 91 S.H. Li Kuei-Shu Chang-Liao 李四海 張廖貴術 2003 學位論文 ; thesis 0 zh-TW |
collection |
NDLTD |
language |
zh-TW |
format |
Others
|
sources |
NDLTD |
description |
碩士 === 國立清華大學 === 工程與系統科學系 === 91 ===
|
author2 |
S.H. Li |
author_facet |
S.H. Li Jack P.H. Tsai 蔡秉宏 |
author |
Jack P.H. Tsai 蔡秉宏 |
spellingShingle |
Jack P.H. Tsai 蔡秉宏 Characteristics and Plasma effects on MOSFET Devices with HfOxNyGate Dielectrics |
author_sort |
Jack P.H. Tsai |
title |
Characteristics and Plasma effects on MOSFET Devices with HfOxNyGate Dielectrics |
title_short |
Characteristics and Plasma effects on MOSFET Devices with HfOxNyGate Dielectrics |
title_full |
Characteristics and Plasma effects on MOSFET Devices with HfOxNyGate Dielectrics |
title_fullStr |
Characteristics and Plasma effects on MOSFET Devices with HfOxNyGate Dielectrics |
title_full_unstemmed |
Characteristics and Plasma effects on MOSFET Devices with HfOxNyGate Dielectrics |
title_sort |
characteristics and plasma effects on mosfet devices with hfoxnygate dielectrics |
publishDate |
2003 |
url |
http://ndltd.ncl.edu.tw/handle/40813786199477234900 |
work_keys_str_mv |
AT jackphtsai characteristicsandplasmaeffectsonmosfetdeviceswithhfoxnygatedielectrics AT càibǐnghóng characteristicsandplasmaeffectsonmosfetdeviceswithhfoxnygatedielectrics AT jackphtsai jiāyǎngdànzhájièdiàncéngjīnyǎngbàndiànjīngtǐtèxìngjíqídiànjiāngxiàoyīngyánjiū AT càibǐnghóng jiāyǎngdànzhájièdiàncéngjīnyǎngbàndiànjīngtǐtèxìngjíqídiànjiāngxiàoyīngyánjiū |
_version_ |
1718319509663645696 |