Dynamic Thrust Bearing Microfabrication Technique with UV-LIGA and Electro-Discharge-Machining

• Main Authors: SHIH-WEI, HSU, 許世瑋
• Other Authors: 陳炳煇
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/33791033079496498287

碩士 === 國立臺灣大學 === 機械工程學研究所 === 91 === The objective of the present thesis is to fabricate the herringbone grooves of dynamic thrust bearing with UV-LIGA and Electro-Discharge-Machining (EDM). The mold of microelectrode is fabricated by SU-8 thick film negative photoresist. Utilizing the microelectrode for EDM can fabricate the microgrooves. The whole fabrication process of dynamic thrust bearing is divided into three stages, including fabricating SU-8 microstructure, micro electroplating, and EDM. we fabricate 250μm microstructure by SU-8 single layer coating. However, we also experiment on different recipes for soft bake, exposure, electroplate, and EDM processes to optimize machining resolution. The precision of pattern transferring is discussed in the thesis. After lithography, micro electroplating, and EDM processes, the error of pattern transferring can be controlled within 5%. Therefore we can complete micromachining with complicated pattern in a very short time. Finally, a high efficiency and low cost microfabrication technique has been realized for dynamic thrust bearing.