Dynamic Thrust Bearing Microfabrication Technique with UV-LIGA and Electro-Discharge-Machining
碩士 === 國立臺灣大學 === 機械工程學研究所 === 91 === The objective of the present thesis is to fabricate the herringbone grooves of dynamic thrust bearing with UV-LIGA and Electro-Discharge-Machining (EDM). The mold of microelectrode is fabricated by SU-8 thick film negative photoresist. Utilizing the m...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33791033079496498287 |