Dynamic Thrust Bearing Microfabrication Technique with UV-LIGA and Electro-Discharge-Machining

Dynamic Thrust Bearing Microfabrication Technique with UV-LIGA and Electro-Discharge-Machining

碩士 === 國立臺灣大學 === 機械工程學研究所 === 91 === The objective of the present thesis is to fabricate the herringbone grooves of dynamic thrust bearing with UV-LIGA and Electro-Discharge-Machining (EDM). The mold of microelectrode is fabricated by SU-8 thick film negative photoresist. Utilizing the m...

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Bibliographic Details
Main Authors:	SHIH-WEI, HSU, 許世瑋
Other Authors:	陳炳煇
Format:	Others
Language:	zh-TW
Published:	2003
Online Access:	http://ndltd.ncl.edu.tw/handle/33791033079496498287

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