Design and Fabrication of a High-speed Micro Plasma Switch
碩士 === 國立臺灣大學 === 機械工程學研究所 === 91 === In this thesis, a high-speed plasma switch, which can be used for military application is designed and fabricated by MEMS technology. Based on the principle of plasma, we apply small voltage to the device for heating polysilicon resistance in order t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/40092207855625424815 |