Simulation and Fabrication of Sub-wavelength Structures for a Nanometer Feature Enabled Lensless Laser Writers

• Main Authors: Ding-Zheng Lin, 林鼎晸
• Other Authors: Chau-Shioung Yeh
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/23988118186412761751

碩士 === 國立臺灣大學 === 應用力學研究所 === 91 === This dissertation concentrated its focus on the extraordinary optical transmission phenomena investigated by many leading research groups worldwide. Many of such results were still published in Science and Nature Journal in year 2003. Taking some of the understanding generated by all previous studies, this dissertation proposed a setup to propagate sub-micrometer light beams without resorting to the conventional approach of using a lens. The main target is to locate a way to either by pass or circumvent the diffraction limit and then evolve this newly developed optical head to the integration of a Laser Writer system. This dissertation includes using surface plasma theory to explain the mechanism of extraordinary transmission phenomena, fabrication process of freestanding metal film, measurements of transmission spectrum and observation of transmission light beam in far field. Both RCWA (Rigorous Coupled Wave Analysis method) and FDTD (Finite Difference Time Domain method) were adopted to simulate the transmission spectrum and electromagnetic field distribution of transmission light beams from near field to far field. The experimental results confirmed that surface structures on the incident side of the incoming light beams can excite surface plasma and enhance the throughput energy of the transmission light beam. In addition, it was also identified that surface structures on the exit side can suppress diffraction effect and make transmission light beam directional. Good agreements were found between the experimental and the simulation results. Finally, this dissertation takes both the simple fabrication process and the general operating condition into considerations, which led to an invention that is related to substrate-based optical head design concepts for sub-wavelength light beam projections.