Summary: | 碩士 === 大同大學 === 光電工程研究所 === 91 === A novel type of the long period fiber grating (LPFG) vibration sensor is presented. For increasing the sensitivity of the sensor, we polish the fiber into the core region, then etch a long period grating into the side-polished surface by virtue of ICP RIE. This structure not only increases the sensitivity of the sensor, but also makes the sensing frequency up to 46 KHz. In addition, small size, easy fabrication, and cheaper all are the advantages of the LPFG vibration sensors. Several frequency measurements are carried out, and the experimental results have very good frequency response from low to high frequency region.
|