Ion Exchange Treatment of Semiconductor Hydrofluoric and Hydrofluosilicic Acid Wastewater
碩士 === 元智大學 === 化學工程學系 === 91 === Hydrofluoric acid has been commonly used in tile semiconductor industries for wafer etching and tool cleaning. Those processes lead to generation of large quantity of waste acid solution which comprises primarily the hydrofluoric (HF) and hydrofluorosilic...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12121750095349262562 |